Nanwang Research Institute develops chip-level DC electric field MEMS sensors

[China Instrument Network Instrument R&D] Recently, Nanwang Scientific Research Institute successfully tested a self-developed chip-level DC electric field MEMS sensor in the UHV Engineering Technology (Kunming) National Engineering Laboratory. This is the first time in the world that MEMS technology has been applied to DC transmission electric field measurement. It can be widely used in the fine design of power equipment, on-line monitoring, electromagnetic environment assessment, lightning observation and warning of meteorological departments, and electric vehicle driving. Electric field electric field detection, aircraft and other fields after the airborne atmosphere electric field monitoring and other fields.

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Compared with traditional field-grinding sensors, MEMS sensors are small in size and light in weight. They are only 1 inch of field-ground sensors, have low power consumption, and only have 3 milliwatts. At the same time, they can reduce distortion due to their small size, greatly improving test accuracy. . The small micro-sensor is a sample successfully developed by the South China Research Institute of Science and Technology in recent years based on the basic subject “Research on Integrated DC Electric Field Sensing Technology Based on MEMS and Wireless Power Supply Technology”. The sample is formed by etching an electrostatic comb drive and a single-layer sidewall sensing electrode structure on a 300 μm thick silicon dioxide wafer to form a 5 mm x 4 mm x 0.3 mm sensor chip as a core and periphery. Circuit co-package developed to form a sensor prototype.
The first research and development of this chip-level MEMS sensor by Nanwang Research Institute is the first time that MEMS technology has been applied to DC transmission electric field measurement at home and abroad. It can be widely used in the fine design of power equipment, online monitoring, electromagnetic environment assessment, and meteorological departments. The field of lightning observation and warning, electric vehicle cockpit electric field detection, aircraft and other air environment after the aerial lift and other fields, to solve the traditional measurement equipment, low accuracy, poor reliability, not suitable for narrow space measurement and other issues, the market prospects, application value huge.
(Original title: South Network Research Institute develops chip-level DC electric field MEMS sensors)

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